Location History:
- Chofushi, JP (1995)
- Chofu, JP (1994 - 1997)
- Tokyo, JP (1992 - 2003)
Company Filing History:
2 out of 10,092 
1 out of 1,530 
1 out of 116 
Years Active: 1992-2003
Title: Hiroaki Yanagida: Innovator in Wafer Clamping and Gas Sensing Technologies
Introduction
Hiroaki Yanagida is a notable inventor based in Tokyo, Japan. With a total of seven patents to his name, he has made significant contributions to the fields of semiconductor technology and gas sensing mechanisms.
Latest Patents
Among Yanagida's latest innovations is the "Platen for Electrostatic Wafer Clamping Apparatus." This invention features a platen body made from dielectric material, infused with grains of electrically conductive material. This advanced design results in a heightened electrostatic capacitance, enhancing clamping force irrespective of humidity levels. Furthermore, the platen's thickness can be reduced while maintaining a consistent clamping force at lower applied voltages, effectively minimizing residual voltage and expediting wafer release. The composition includes 2.5 to 15 percent of conductive grains, which may consist of carbonated and nitrified transition metals, with a preferred combination of titanium carbide making up approximately 5% of the platen's volume, ideally using Al2O3 as the dielectric material.
Another significant patent is the "Piezoelectric Actuator Sensitive to Reducing Gas." This actuator comprises two bonded regions: one made of a material responsive to reducing gas, and another consisting of a piezoelectric material that remains unaffected by the gas. Each region is outfitted with electrodes to apply an electric field to the piezoelectric material, enabling effective gas detection.
Career Highlights
Hiroaki Yanagida has played crucial roles in prominent companies such as Honda Giken Kogyo Kabushiki Kaisha and Mitsubishi Materials Corporation. His work in these organizations has been instrumental in developing innovative solutions and enhancing technological capabilities.
Collaborations
During his career, Yanagida has collaborated with esteemed colleagues, including Masaru Miyayama and Norio Muto. Together, they have worked on various projects that furthered the boundaries of existing technologies.
Conclusion
Hiroaki Yanagida's inventive spirit and contributions have positioned him as an influential figure in technology, particularly in wafer clamping and gas sensing environments. His patents reflect a deep understanding of material science and engineering, which continues to inspire future innovations in the field.