Location History:
- Chiba, JP (2006)
- Sammu, JP (2011)
Company Filing History:
Years Active: 2006-2011
Title: Hiroaki Kawamura: Innovator in Plasma CVD Technology
Introduction
Hiroaki Kawamura, an inventive mind residing in Sammu, Japan, is recognized for his contributions to the field of plasma chemical vapor deposition (CVD). His work has led to the issuance of two patents, addressing critical technology needs in thin film formation.
Latest Patents
Kawamura's latest patents showcase innovative solutions for achieving high-quality thin films. The first patent, entitled "Winding Type Plasma CVD Apparatus," focuses on providing a uniform reaction gas supply to enhance the layer quality during deposition. This apparatus supports the film using movable rollers that keep the distance between the shower plate and the film consistent. The design also includes a self-cleaning process, ensuring efficient operation.
The second patent, titled "Thin Film Forming Apparatus and Method," presents a method for efficiently correcting film thickness variations. This intricate process utilizes a film thickness monitor to measure the thin film's distribution accurately. It employs an innovative method where multiple steps are repeated to ensure precision, resulting in a uniform and high-quality thin film.
Career Highlights
Kawamura currently works at Ulvac, Inc., a leading company in vacuum technology and CVD systems. His experience and expertise have greatly contributed to advancing the company's technological capabilities and innovations in plasma deposition processes.
Collaborations
Throughout his career, Kawamura has collaborated with notable colleagues, including Noriaki Tani and Toshihiro Suzuki. These collaborations have further enhanced his research efforts and the successful development of innovative technologies in the thin film business.
Conclusion
Hiroaki Kawamura's inventive contributions stand out in the evolving landscape of plasma CVD technology. His patents exemplify his commitment to enhancing quality and efficiency in thin film production. Collaborating with talented individuals and working with Ulvac, Inc., he continues to impact the industry with his innovative spirit and technical expertise.