Location History:
- Himeji, JP (2018)
- Tokyo, JP (2019)
Company Filing History:
Years Active: 2018-2019
Title: Innovations of Hideyuki Urakami in Extreme Ultraviolet Light Source Technology
Introduction
Hideyuki Urakami is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of extreme ultraviolet light source technology. With a total of two patents to his name, Urakami's work has advanced the capabilities of light source devices used in various applications.
Latest Patents
Urakami's latest patents include innovative designs for discharge electrodes and light source devices. The first patent describes an extreme ultraviolet light source device that features a pair of disk-shaped discharge electrodes. These electrodes face each other with their peripheral portions spaced apart. The device includes a pulsed power supply unit that provides pulsed power to the electrodes, a raw material supply unit for delivering materials that emit extreme ultraviolet light, and an energy beam irradiation unit that vaporizes the raw materials on the electrodes' surfaces. Notably, at least one of the discharge electrodes has a tapered surface that decreases in thickness radially outward.
The second patent focuses on a similar extreme ultraviolet light source device. This device comprises two discharge electrodes, two plasma raw material containers, and two supply units. The supply units deliver plasma raw materials to the discharge electrodes during their rotation. Additionally, the device includes an energy beam irradiating unit that vaporizes the plasma raw material, facilitating electric discharge between the electrodes to generate plasma. It also features two film thickness regulating units that ensure the plasma raw material maintains a predetermined thickness on the electrodes.
Career Highlights
Urakami is currently employed at Ushio Denki Kabushiki Kaisha, where he continues to innovate in the field of light source technology. His work has been instrumental in developing advanced devices that enhance the efficiency and effectiveness of extreme ultraviolet light sources.
Collaborations
Throughout his career, Urakami has collaborated with talented individuals such as Yusuke Teramoto and Akihisa Nagano. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Hideyuki Urakami's contributions to extreme ultraviolet light source technology demonstrate his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving the efficiency and functionality of light source devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.