This inventor holds 1 USPTO granted patent. Top assignee: Nippondenso Co., Ltd.. Active years: 1997.
Company Filing History:
Years Active: 1997
Title: Innovations of Hideya Inagaki in Semiconductor Manufacturing.
Introduction
Hideya Inagaki is a notable inventor based in Kasugai, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent that addresses critical issues in the production process.
Latest Patents
Inagaki holds a patent titled "Method for making FET having reduced oxidation inductive stacking fault." This patent presents an improved manufacturing method for semiconductor devices, aimed at reducing process inductive faults such as oxidation inductive stacking faults (OSF). The method enhances the electric characteristics of semiconductor devices by forming a thermal oxide film on a semiconductor substrate, followed by a nitride film. A medium temperature heat treatment is then applied within a range of 600°C to 1,000°C, which lowers the interstitial oxygen concentration. The process includes ion implantation and a drive-in process facilitated by high-temperature heat treatment, with specific parameters set for ion implantation dose and treatment duration. This innovative approach ultimately leads to the formation of essential components such as the gate oxide film, gate electrode, and source/drain layer.
Career Highlights
Inagaki's career is marked by his dedication to advancing semiconductor technology. His work has not only contributed to the efficiency of manufacturing processes but has also played a crucial role in enhancing the performance of semiconductor devices.
Collaborations
Inagaki has collaborated with Hiroyasu Itou, furthering the development of innovative solutions in the semiconductor industry. Their partnership exemplifies the importance of teamwork in achieving technological advancements.
Conclusion
Hideya Inagaki's contributions to semiconductor manufacturing through his innovative patent demonstrate his expertise and commitment to improving technology. His work continues to influence the industry positively.