Location History:
- Kanagawa, JP (2010 - 2011)
- Harrison, NY (US) (2011)
- Yokohama, JP (2000 - 2012)
Company Filing History:
Years Active: 2000-2012
Title: Innovations of Hideto Matsuyama
Introduction
Hideto Matsuyama is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on methods of manufacturing semiconductor devices, which are crucial for modern electronics.
Latest Patents
Matsuyama's latest patents include a method of manufacturing a semiconductor device that effectively removes damage layers and native oxide films in connection holes. This innovative process involves dry-etching an insulating film to create a connection hole that exposes a conducting layer. Plasma is then supplied to dry-clean the damage layer produced in the connection hole. Following this, a wet process is used to remove any products created during the dry cleaning. Additionally, an oxide film formed in the connection hole is etched using a chemical dry process with gases such as NF or HF. The thermally decomposable reaction product resulting from the etching is subsequently removed through heat treatment. Another notable patent involves a method of manufacturing a semiconductor device that includes providing an insulating film above a semiconductor substrate and forming a silicon oxide film through dehydration condensation.
Career Highlights
Hideto Matsuyama is associated with Kabushiki Kaisha Toshiba, a leading company in the technology sector. His work at Toshiba has allowed him to develop and refine his innovative methods in semiconductor manufacturing, contributing to the advancement of the industry.
Collaborations
Matsuyama has collaborated with notable colleagues such as Yoshihiko Nakano and Rikako Kani. Their combined expertise has further enhanced the research and development efforts in semiconductor technology.
Conclusion
Hideto Matsuyama's contributions to semiconductor manufacturing through his innovative patents have significantly impacted the technology landscape. His work continues to influence advancements in the field, showcasing the importance of innovation in driving progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.