Hideki Mataga

Title: Innovations of Hideki Mataga

Introduction

Hideki Mataga is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of magnetron sputtering technology. His work has led to advancements that enhance the efficiency and effectiveness of sputtering apparatuses.

Latest Patents

Hideki Mataga holds a patent for a cathode unit designed for magnetron sputtering apparatuses. This innovative cathode unit features a backing plate that is joined to an upper side opposed to a sputtering surface of a target. The target is set in a posture facing the inside of a vacuum chamber. Additionally, a magnet unit is disposed above the backing plate at an interval. The backing plate contains a refrigerant passage that allows a refrigerant to flow through it. A surface pressure applying unit is also provided, which applies a surface pressure equivalent to the pressure exerted on the upper inner surface of the backing plate when the refrigerant circulates. This invention is crucial for improving the performance of magnetron sputtering systems.

Career Highlights

Hideki Mataga is currently employed at Ulvac, Inc., a company known for its advanced vacuum technology and equipment. His work at Ulvac has allowed him to focus on developing innovative solutions in the field of sputtering technology. His contributions have been instrumental in enhancing the capabilities of the company's products.

Collaborations

Throughout his career, Hideki Mataga has collaborated with talented individuals such as Koji Suzuki and Hideto Nagashima. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Hideki Mataga's contributions to the field of magnetron sputtering technology are noteworthy. His patent for a cathode unit demonstrates his commitment to advancing this technology. His work at Ulvac, along with his collaborations, highlights his role as a significant inventor in the industry.