Company Filing History:
Years Active: 1982-2003
Title: Innovations of Inventor Hidekazu Okabayashi in Copper and Aluminum Interconnections
Introduction
Hidekazu Okabayashi is a noted inventor based in Tokyo, Japan. He has contributed significantly to the field of semiconductor technology with a total of six patents to his name. His innovative work focuses on improving the reliability and cost-effectiveness of interconnections used in electronic devices.
Latest Patents
Among Hidekazu Okabayashi's latest patents, one notable invention is a copper interconnection that features a copper or copper alloy layer. This innovative design ensures that at least 50% of the crystal grains of copper or its alloy form twins, enhancing reliability and reducing production costs significantly.
Another influential patent relates to a method for forming an aluminum film utilized as an interconnect. This method involves covering the surface of contact holes or via-holes with a film of refractory metal or compound and subsequently depositing an aluminum film via a chemical vapor deposition (CVD) process. The specific conditions, including a substrate temperature between 100°C and 180°C, allow for excellent step coverage, ensuring that even with small diameters and high aspect ratios, the film remains void-free.
Career Highlights
Hidekazu Okabayashi has worked with prominent companies such as NEC Corporation and Nippon Electric Co., Ltd. His tenure at these organizations has been marked by his dedication to pioneering advancements in interconnect technology.
Collaborations
Throughout his career, Okabayashi has collaborated with esteemed colleagues, including Mitsutaka Morimoto and Eiji Nagasawa. These partnerships have fostered a dynamic exchange of ideas, leading to the development of groundbreaking technologies in the semiconductor industry.
Conclusion
Hidekazu Okabayashi is a prominent figure in the realm of semiconductor inventions. His contributions, particularly in the area of copper and aluminum interconnections, showcase his commitment to innovation, quality, and reliability in electronic manufacturing. With six patents to his name, his work continues to impact the industry positively.