Hidekazu Kiyama

Title: Inventor Hidekazu Kiyama: Innovating Substrate Transfer Technologies

Introduction

Hidekazu Kiyama, an accomplished inventor based in Koshi, Japan, has made significant contributions to the field of substrate processing. With a total of four patents to his name, Kiyama is recognized for his innovative approaches to substrate transfer technologies, which play a crucial role in semiconductor manufacturing.

Latest Patents

Among Kiyama's latest patents is the "Substrate Transfer Apparatus and Substrate Transfer Method." This invention features a non-conductive support designed to hold the substrate without direct contact, utilizing a mover for efficient substrate transfer. A unique aspect of this patent is the conductive contact integrated into the support, which maintains the substrate in a position that is safe from physical contact with the support itself. The inventive strip-shaped conductive path includes a bent portion, carefully designed to enhance the transfer process.

Additionally, Kiyama has developed a "Substrate Processing Apparatus, Substrate Processing Method and Recording Medium." This apparatus is equipped with a transfer device facilitating both normal and high-accuracy transfer modes, which allow for precise positioning of substrates. It also includes a warm-up controller that activates a special operation if the transfer device has been stationary for an extended period, ensuring optimal performance during high-accuracy transfers.

Career Highlights

Hidekazu Kiyama is currently employed at Tokyo Electron Limited, a company recognized for its cutting-edge technology in the semiconductor industry. His work is instrumental in advancing the methods of substrate processing, contributing to the efficiency and effectiveness of semiconductor manufacturing.

Collaborations

Kiyama collaborates with esteemed coworkers Suguru Enokida and Masahiro Nakaharada, sharing ideas and expertise to further refine and develop innovative technologies in substrate transfer and processing. Their teamwork enhances the overall approach to research and development within their organization.

Conclusion

In summary, Hidekazu Kiyama stands out as an influential inventor in Japan, holding multiple patents that are crucial for substrate transfer technology. His inventions not only demonstrate technical ingenuity but also reflect a commitment to improving processes within the semiconductor industry. As the landscape of technology continues to evolve, Kiyama's contributions will undoubtedly leave a lasting impact on the field.