Hidehito Soeta

Title: Innovations of Hidehito Soeta

Introduction

Hidehito Soeta is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus.

Latest Patents

Soeta holds a patent for a plasma processing apparatus. This apparatus includes at least one asymmetry member that causes a non-uniformity of plasma density around the high-frequency electrode. Additionally, it features a plasma density distribution controller designed to suppress this non-uniformity in the azimuthal direction. The controller consists of a first conductor with surfaces facing opposite directions and a second conductor that connects to a conductive grounding member.

Career Highlights

Hidehito Soeta is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to focus on advancing plasma processing technologies.

Collaborations

Soeta has collaborated with notable coworkers, including Yohei Yamazawa and Naohiko Okunishi. Their combined efforts contribute to the innovative projects at Tokyo Electron Limited.

Conclusion

Hidehito Soeta's contributions to plasma processing technology exemplify the impact of innovation in the electronics industry. His patent and work at Tokyo Electron Limited highlight his role as a significant inventor in this field.