Hideaki Udou

Title: Innovations of Hideaki Udou

Introduction

Hideaki Udou is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding 2 patents that showcase his innovative approach to technology. His work primarily focuses on enhancing the efficiency and effectiveness of substrate processing methods and apparatus.

Latest Patents

Udou's latest patents include a substrate processing apparatus and a substrate processing method that feature an enhanced configuration for replenishing processing liquid. The apparatus consists of a tank for storing processing liquid, a circulation line, a branch line, and a processing part that supplies the processing liquid to a substrate. It also includes a discharge part to reduce the storage amount of the processing liquid and a supply part for introducing new processing liquid into the tank. The controller within the apparatus is designed to determine when the storage amount is below a lower limit and to manage the replenishment of processing liquid accordingly.

The substrate processing method involves a series of steps: a water-repellency step, a rinse step, and a dry step. During the water-repellency step, a heated water-repellent agent is applied to the substrate. Following this, a rinse liquid is supplied in the rinse step, and finally, the rinse liquid is removed in the dry step. These innovations reflect Udou's commitment to improving substrate processing techniques.

Career Highlights

Hideaki Udou is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His role involves developing advanced technologies that enhance substrate processing capabilities. His contributions have been instrumental in advancing the company's technological offerings.

Collaborations

Udou has collaborated with talented coworkers, including Kazuki Kosai and Seiya Fujimoto. Their combined expertise has fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Hideaki Udou's work in substrate processing has led to significant advancements in the field. His patents demonstrate a clear understanding of the complexities involved in substrate processing and reflect his innovative spirit. Through his contributions at Tokyo Electron Limited, Udou continues to influence the future of technology in this area.