This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Innovations by Hideaki Kumashiro
Introduction
Hideaki Kumashiro is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. His innovative approach has led to the development of a unique substrate processing apparatus.
Latest Patents
Kumashiro holds a patent for a substrate processing apparatus and substrate processing method. This apparatus is designed to dry a substrate using a processing fluid in a supercritical state. The system includes a processing vessel, a substrate holder, a first supply line for the processing fluid, a drain line for fluid removal, and a bypass line that allows part of the processing fluid to be drained without passing through the processing vessel. Additionally, it features a bypass opening/closing valve to control the flow.
Career Highlights
Kumashiro is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has been instrumental in advancing substrate processing techniques, which are crucial for various applications in electronics.
Collaborations
He has collaborated with notable colleagues such as Masami Yamashita and Satoru Tanaka, contributing to the innovative environment at Tokyo Electron Limited.
Conclusion
Hideaki Kumashiro's contributions to substrate processing technology exemplify the spirit of innovation. His patent reflects a significant advancement in the field, showcasing his expertise and dedication to improving manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile