Herman F Keldermann

Title: Innovations by Herman F. Keldermann

Introduction

Herman F. Keldermann is a notable inventor based in Berkeley, CA. He has made significant contributions to the field of particle detection technology. His innovative approach has led to the development of a unique method for detecting particles on patterned surfaces.

Latest Patents

Keldermann holds a patent for "Particle detection on patterned wafers and the like." This invention utilizes a single light beam that scans at a shallow angle over a periodic patterned surface. The method involves a plurality of identical die with streets between them. The light beam scans parallel to the street direction, while a light collection system gathers scattered light with a constant solid angle. The arrangement of the collection system, along with the polarization of both the light beam and the collected light, is optimized to enhance the particle signal relative to the pattern signal. A detector generates an electrical signal that corresponds to the intensity of the scattered light collected. A processor constructs templates from this electrical signal and compares them to identify particles. The reference template is continuously updated to ensure accurate comparisons between adjacent die.

Career Highlights

Keldermann is associated with Tencor Instruments, where he has applied his expertise in particle detection technology. His work has been instrumental in advancing the capabilities of detection systems in various applications.

Collaborations

He has collaborated with notable colleagues such as Franklin R. Koenig and Armand P. Neukermans, contributing to the development of innovative technologies in their field.

Conclusion

Herman F. Keldermann's contributions to particle detection technology exemplify the impact of innovative thinking in engineering. His patent reflects a significant advancement in the ability to detect particles on patterned surfaces, showcasing his expertise and dedication to the field.