This inventor holds 2 USPTO granted patents. Top assignee: Siemens Aktiengesellschaft. Active years: 1987-1989.
Company Filing History:
Years Active: 1987-1989
Title: Herbert Eigenstetter: Innovator in Precision Measurement and Optical Imaging
Introduction
Herbert Eigenstetter is a notable inventor based in Planegg, Germany. He has made significant contributions to the fields of precision measurement and optical imaging, holding a total of 2 patents. His work focuses on enhancing the accuracy and efficiency of measurement techniques, particularly in semiconductor technology.
Latest Patents
Eigenstetter's latest patents include a method for high precision position measurement of two-dimensional structures. This innovative method utilizes a reference mask with a two-dimensional grid, allowing for the identification of the relative position of structures through opto-electronic scanning and image processing. The absolute position can then be determined based on the grid elements' positions, with a binary coding system that aids in decoding the grid's layout.
Another significant patent involves an arrangement for optical imaging of two subjects located in different object planes. This invention features a displaceable objective that can focus on different planes with high reproducibility. The design incorporates a piezo positioning drive that enables precise movement, essential for applications such as automatic mask adjustment in x-ray lithography for semiconductor wafers.
Career Highlights
Herbert Eigenstetter is associated with Siemens Aktiengesellschaft, a leading global technology company. His work at Siemens has allowed him to develop and refine his innovative ideas, contributing to advancements in measurement and imaging technologies.
Collaborations
Eigenstetter has collaborated with notable colleagues, including Peter Mengel and Guenter Doemens. These partnerships have fostered a collaborative environment that enhances the development of cutting-edge technologies.
Conclusion
Herbert Eigenstetter's contributions to precision measurement and optical imaging demonstrate his commitment to innovation in technology. His patents reflect a deep understanding of the complexities involved in semiconductor applications, positioning him as a key figure in his field.