The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1987
Filed:
Nov. 15, 1985
Herbert Eigenstetter, Planegg, DE;
Peter Mengel, Eichenau, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
In the optical imaging of two subjects located in different object planes, at least one objective should be capable of being displaced for focusing relative to the object planes, being displaceable absolutely in a shift-free manner and with a very high positioning reproducibility. To this end, a positioning drive, particularly a piezo positioning drive, effects movement at a housing section which is displaceable relative to the object planes and at least carries the objective, whereby the displaceable housing section must be connected to the remaining, stationarily situated housing via resilient connections which are formed by elastically deformable weak points of the housing. Apparatus fashioned in such a manner are employed particularly for automatic mask adjustment in the transfer of structures in the sub micrometer range on the semiconductor wafers by way of x-ray lithography.