Heonju Shin

Title: **Heonju Shin: Innovating Defect Detection in Semiconductor Manufacturing**

Introduction

Heonju Shin is an accomplished inventor based in Yongin-si, South Korea, known for his innovative contributions to the field of semiconductor manufacturing. With a focus on enhancing defect detection processes, Heonju has developed a patent that addresses critical challenges faced in the industry.

Latest Patents

Heonju Shin holds a patent for a groundbreaking system entitled "Print Check Repeater Defect Detection." This invention encompasses systems and methods for detecting defects on a reticle. The patented technology involves generating stacked difference images for multiple instances of patterned areas on a wafer, based on images obtained from those areas in different rows. The system is adept at performing double detection using these images, thereby identifying defects effectively. This invention significantly reduces noise and allows for the detection of substantially small repeater defects, proving to be crucial for high sensitivity defect detection, particularly in extreme ultraviolet (EUV) reticles and multi-die reticles (MDR).

Career Highlights

Heonju currently works at Kla Corporation, a leading company in semiconductor and advanced manufacturing technologies. His expertise and innovative approach have positioned him as an invaluable asset within the organization. The impact of his patent is expected to lead to significant advancements in the field, enhancing the precision and efficiency of defect detection in semiconductor production.

Collaborations

Throughout his career, Heonju Shin has collaborated with talented professionals such as Nurmohammed Patwary and James A Smith. These collaborations have fostered a dynamic working environment conducive to innovation and creativity, further driving the development of effective solutions within semiconductor manufacturing.

Conclusion

Heonju Shin's contributions to the field of defect detection in semiconductor manufacturing are noteworthy and set the pace for future innovations. His commitment to addressing industry challenges through inventive solutions places him at the forefront of technological advancements in the sector. As the semiconductor industry continues to evolve, the implications of his patent will likely resonate, paving the way for enhanced manufacturing processes.