Henry Y Kumagai

Title: Innovator Henry Y Kumagai: Pioneering Thin Film Technologies

Introduction: Henry Y Kumagai, an esteemed inventor based in Orefield, PA, has made significant contributions to the field of semiconductor technology with his inventive spirit. With two patents to his name, his work has led to advancements in the manufacturing processes and capabilities of integrated circuits, reflecting both his expertise and innovative vision.

Latest Patents: Kumagai's latest innovations include two notable patents focused on enhancing semiconductor devices. The first patent, titled "Thin film capacitors and process for making them," reveals a cutting-edge thin film capacitor designed for use in semiconductor integrated circuit devices, such as analog circuits, RF circuits, and dynamic random-access memories (DRAMs). This capacitor features a dielectric thickness of less than 50 nm, showcasing a capacitance density of at least 15 fF/μm² and a breakdown field of at least 1 MV/cm. Utilizing a metal oxide dielectric material, which may contain titanium, niobium, or tantalum, his process effectively forms the dielectric layer through anodic oxidation. A top electrode can then be fabricated, ensuring the electrical characteristics of the dielectric layer remain intact.

Kumagai's second patent, "Apparatus and method for making integrated circuits," introduces an advanced technique for manufacturing integrated circuits. This invention highlights an improved apparatus featuring protrusions extending from the wafer support susceptor to slightly electrically decouple the wafer during plasma processing, preventing debris buildup that might cause variability in processing results across different production lots.

Career Highlights: Kumagai's influential career is marked by his position at Lucent Technologies Inc., where he applies his extensive knowledge and experience in semiconductor technology. His innovative work reflects his commitment to pushing the boundaries of what is possible in integrated circuit manufacturing.

Collaborations: Throughout his career, Kumagai has collaborated with talented colleagues such as Salvador Duenas and Ratnaji R Kola. These collaborations have fostered a creative environment that encourages the exchange of innovative ideas and the development of groundbreaking technologies in semiconductor applications.

Conclusion: Henry Y Kumagai’s notable contributions to thin film technology and integrated circuit manufacturing underscore his role as a visionary inventor. His patents not only enhance the performance of semiconductor devices but also demonstrate the importance of innovation in driving technological advancements. Through his work at Lucent Technologies Inc., Kumagai continues to influence the future of electronics and pave the way for new developments in the field.