Hendrik Den Boer

Title: Hendrik Den Boer: Innovator in Charged Particle Lithography

Introduction

Hendrik Den Boer is a notable inventor based in 's-Gravenzande, Netherlands. He has made significant contributions to the field of charged particle lithography, particularly through his innovative designs and patents. His work focuses on enhancing the efficiency and effectiveness of modulation devices used in advanced lithography systems.

Latest Patents

Hendrik Den Boer holds a patent for a modulation device and power supply arrangement. This invention relates to a modulation device for modulating charged particle beamlets in accordance with pattern data in a multi-beamlet charged particle lithography system. The device comprises a plate-like body, an array of beamlet deflectors, a plurality of power supply terminals for supplying at least two different voltages, a plurality of control circuits, and a conductive slab for supplying electrical power to one or more of the power supply terminals. The plate-like body is divided into an elongated beam area and an elongated non-beam area positioned with their long edges adjacent to each other. The beamlet deflectors are located in the beam area, while the control circuits are situated in the non-beam area. The conductive slab is connected to the control circuits in the non-beam area and comprises a plurality of thin conductive plates. This patent showcases his innovative approach to improving lithography technology.

Career Highlights

Hendrik Den Boer is currently associated with Mapper Lithography IP B.V., a company that specializes in advanced lithography solutions. His role involves developing cutting-edge technologies that push the boundaries of what is possible in the field of charged particle lithography. His expertise and innovative mindset have made him a valuable asset to the company.

Collaborations

Hendrik has collaborated with Teunis Van De Peut, working together to advance their shared goals in the field of lithography. Their partnership has contributed to the development of innovative solutions that enhance the capabilities of charged particle lithography systems.

Conclusion

Hendrik Den Boer is a prominent inventor whose work in charged particle lithography has led to significant advancements in the field. His patent for a modulation device exemplifies his innovative spirit and dedication to improving lithography technology. His contributions continue to shape the future of this important industry.