Alzenau, Germany

Helmuth Lammermann


Average Co-Inventor Count = 6.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 1989

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1 patent (USPTO):Explore Patents

Title: Helmuth Lammermann: Innovator in Reactive Vapor Deposition Technology

Introduction

Helmuth Lammermann is a notable inventor based in Alzenau, Germany. He has made significant contributions to the field of materials science, particularly in the area of reactive vapor deposition of metal compounds. His innovative approach has led to advancements in the manufacturing processes of various substrates.

Latest Patents

Lammermann holds a patent for a "Method and apparatus for the reactive vapor depositing of metal compounds." This invention involves a method and apparatus for the reactive deposition of vapors of metal compounds onto substrates. The process utilizes the evaporation of at least one metal through an electron beam in a controlled atmosphere with reaction gas at pressures not exceeding 10^-1 mbar. An electrode, positively biased with respect to ground and operating at an acceleration voltage of at least 20 kV, is strategically placed in the vapor stream directed towards the substrate. The metal vapor is generated in an internal chamber surrounding the evaporator, which features a masked orifice opposite the substrate. The introduction of the reaction gas into this chamber allows for the guided flow of both metal vapor and reaction gas towards the substrate.

Career Highlights

Lammermann is associated with Leybold-Heraeus GmbH, a company renowned for its expertise in vacuum technology and thin film deposition. His work at this organization has been pivotal in advancing the techniques used in reactive vapor deposition, enhancing the efficiency and effectiveness of the processes involved.

Collaborations

Throughout his career, Lammermann has collaborated with esteemed colleagues such as Volker Bauer and Albert Feuerstein. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field.

Conclusion

Helmuth Lammermann's contributions to the field of reactive vapor deposition have established him as a key figure in materials science. His innovative patent and work at Leybold-Heraeus GmbH continue to influence the industry positively.

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