Company Filing History:
Years Active: 1985-1993
Title: Helmut Baumgart: Innovator in Silicon-On-Insulator Technology
Introduction
Helmut Baumgart is a notable inventor based in Mahopac, NY (US). He has made significant contributions to the field of semiconductor technology, particularly in the development of silicon-on-insulator materials. With a total of 3 patents to his name, Baumgart's work has had a lasting impact on integrated circuit design and manufacturing.
Latest Patents
Baumgart's latest patents include a "Process for making strain-compensated bonded silicon-on-insulator." This innovative method involves forming a p-type silicon epitaxial layer doped with boron and a higher concentration of germanium on a semiconductor silicon substrate. The process continues with the formation of an additional silicon epitaxial layer, followed by the creation of oxide layers that bond the substrates together. The method also includes etching techniques to remove excess silicon substrate while preserving the integrity of the p-type epitaxial layer.
Another significant patent is the "Method of forming improved encapsulation layer." This technique enhances the formation of silicon-on-insulator films used in integrated circuits. The encapsulation layer consists of a doped SiO₂ layer, which forms a fusible glassy material, and a Si₃N₄ layer that adds mechanical strength. This innovative approach allows for better control during the zone melt recrystallization process, accommodating volume expansion and reducing biaxial stresses.
Career Highlights
Helmut Baumgart has spent a considerable part of his career at North American Philips Corporation, where he has been instrumental in advancing semiconductor technologies. His expertise in silicon-on-insulator materials has positioned him as a key figure in the industry.
Collaborations
Throughout his career, Baumgart has collaborated with notable colleagues, including Emil Arnold and Ronald D. Pinker. These collaborations have contributed to the development of innovative technologies and have fostered a spirit of teamwork in the field of semiconductor research.
Conclusion
Helmut Baumgart's contributions to silicon-on-insulator technology and his innovative patents have significantly influenced the semiconductor industry. His work continues to inspire future advancements in integrated circuit design and manufacturing.