Location History:
- Duisburg, DE (1994 - 1996)
- Langebruck, DE (1999)
Company Filing History:
Years Active: 1994-1999
Title: Heinz Kuck: Innovator in Photolithography
Introduction
Heinz Kuck is a notable inventor based in Duisburg, Germany. He has made significant contributions to the field of photolithography, holding a total of 4 patents. His work focuses on developing advanced methods and devices that enhance the production of features on photolithographic layers.
Latest Patents
Among his latest patents is a method and device for producing features on a photolithographic layer. This innovation includes an illumination device that utilizes a pulsed laser source and a Schlieren optical system. The illumination device is designed for the direct illumination of light-sensitive layers and comprises a light source and a pattern generator. The pattern generator features an optical Schlieren system and an active, matrix-addressable surface light generator. The Schlieren system consists of a Schlieren lens, a projection lens, and a mirror device that directs light from the light source onto the surface of the surface light modulator. A filter device is incorporated to filter out diffracted light while allowing undiffracted light to pass from the surface light modulator to the projection lens. The structure to be illuminated is secured on a displaceable positioning table, and the surface light modulator is addressed so that the non-addressed surface areas correspond to the projection areas of the structure that require illumination.
Career Highlights
Heinz Kuck is associated with the Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., a leading research organization in Germany. His work at this institution has allowed him to push the boundaries of photolithographic technology and contribute to various advancements in the field.
Collaborations
Heinz has collaborated with notable colleagues, including Holger Vogt and Gunther Hess. Their combined expertise has fostered innovation and development in their respective areas of research.
Conclusion
Heinz Kuck's contributions to photolithography and his innovative patents highlight his role as a significant inventor in the field. His work continues to influence advancements in technology and research.