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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 5936713 B1

PDFFull Text
Date of Patent:
Aug. 10, 1999

Filed:

Jan. 29, 1998

Method and device for producing features on a photolithographic layer

Applicant:
Inventors:

Jorg Paufler, Bischofswerda, DE;

Rolf Seltmann, Dresden, DE;

Heinz Kuck, Langebruck, DE;

Assignee:

Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V., Munich, DE;

Attorney:

Duft, Graziano & Forest, P.C.

Primary Examiner:

Safet Metjahic

Assistant Examiner:

Peter Kim

Int. Cl.
CPC ...
G03B / ; G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 67 ; 355 40 ; 355 43 ; 355 53 ;

Find Patent Forward Citations

Paufler, Jorg. (1999). Method and device for producing features on a photolithographic layer (U.S. Patent No. 5936713). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5936713

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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