Heike Scholtz

Title: Heike Scholtz: Innovator in Optical Lithography Processes

Introduction

Heike Scholtz is a prominent inventor based in Dresden, Germany. She has made significant contributions to the field of optical lithography, particularly in micro device fabrication. Her innovative approach has led to the development of a unique monitoring system that enhances the efficiency and reliability of lithography processes.

Latest Patents

Heike holds a patent for a "Method and system for excursion monitoring in optical lithography processes in micro device fabrication." This patent describes a process monitoring system that can detect out-of-control situations based on a single criterion across various lithography processes. The system processes data sets related to specific lithography types to determine relative data, centering around the same mean value for standard control situations.

Career Highlights

Heike Scholtz is currently employed at Globalfoundries Inc., where she continues to push the boundaries of innovation in her field. Her work has been instrumental in advancing the technology used in micro device fabrication, making her a valuable asset to her company and the industry at large.

Collaborations

Heike collaborates with talented colleagues, including Andre Poock and Daniel Zschaebitz, who contribute to her projects and research initiatives. Their teamwork fosters an environment of creativity and innovation, leading to groundbreaking advancements in optical lithography.

Conclusion

Heike Scholtz exemplifies the spirit of innovation in the field of optical lithography. Her contributions, particularly her patented monitoring system, have the potential to revolutionize micro device fabrication processes. Her work continues to inspire future advancements in technology.