Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Globalfoundries Inc. (1 from 5,671 patents)
1 patent:
1. 8660681 - Method and system for excursion monitoring in optical lithography processes in micro device fabrication