Hector Velasco

Title: Innovations by Hector Velasco in Semiconductor Manufacturing

Introduction

Hector Velasco is a notable inventor based in Milpitas, CA, who has made significant contributions to the field of semiconductor manufacturing. With a total of three patents to his name, Velasco has focused on improving chemical vapor deposition processes, which are crucial for the production of advanced semiconductor devices.

Latest Patents

Velasco's latest patents include innovative processes for the deposition of tungsten nitride (WNx) in semiconductor manufacturing. One of his improved processes utilizes NF as a nitrogen source, introducing plasma under controlled conditions to manage particle formation and reduce the temperature required for producing acceptable films. Another patent describes the production of substantially pure tungsten through rapid thermal annealing of amorphous tungsten nitride at lower temperatures by using hydrogen in the ambient atmosphere. Additionally, he has developed processes that control particle formation and enhance step coverage when using NH as a nitrogen source by limiting the pressure during gas mixing and employing unique wall coating techniques. Furthermore, Velasco has created methods for minimizing as-deposited stress in tungsten by implementing preflow and postflow of reducing gases in a CVD reactor system.

Career Highlights

Throughout his career, Hector Velasco has worked with various companies, including Genus, Inc. His work has been instrumental in advancing the techniques used in chemical vapor deposition, which is essential for the fabrication of semiconductor devices.

Collaborations

Velasco has collaborated with notable professionals in the field, including Sien G Kang and John Y Adachi. Their combined expertise has contributed to the successful development of innovative processes in semiconductor manufacturing.

Conclusion

Hector Velasco's contributions to the semiconductor industry through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the advancement of manufacturing processes, ensuring the production of high-quality semiconductor devices.