Company Filing History:
Years Active: 2003
Title: **Innovative Advances by Haznita Abd Karim in Rapid Thermal Processing**
Introduction
Haznita Abd Karim is a notable inventor based in Singapore, recognized for his contribution to the field of semiconductor manufacturing. With a focus on advanced processing techniques, his innovative work has culminated in one granted patent that enhances the calibration of rapid thermal process systems, a crucial element in semiconductor fabrication.
Latest Patents
Haznita Abd Karim's patent, titled "Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation," presents a groundbreaking method for enhancing the performance and uniformity of rapid thermal processing systems. The patent outlines a procedure where wafers with a silicon semiconductor substrate and a refractory metal layer are subjected to silicidation at varying temperatures. The key innovation lies in measuring the sheet resistance uniformity to detect silicidation phase transition temperature points, allowing for precise calibration of the rapid thermal process systems. The patented method accounts for temperature points ranging from approximately 200 to 800 °C, depending on the type of refractory metal used.
Career Highlights
Haznita Abd Karim is associated with Chartered Semiconductor Manufacturing Ltd, a prominent corporation in the semiconductor industry. His role involves leveraging innovative processes to enhance manufacturing efficiency. His work is instrumental in overcoming challenges related to temperature calibration in rapid thermal processing, thereby contributing significantly to advancements in semiconductor technology.
Collaborations
Throughout his career, Haznita has collaborated with esteemed colleagues such as Zhong Yun Zhu and Rajneesh Jaiswal. Their collaborative efforts reflect a shared commitment to innovation and excellence in semiconductor manufacturing, driving forward new methodologies that improve fabrication processes.
Conclusion
In conclusion, Haznita Abd Karim stands out as a pioneering inventor whose work on the silicidation phase transition temperature points has not only contributed to the field of semiconductor manufacturing but has also paved the way for enhanced rapid thermal processing techniques. His innovative spirit and collaboration with talented peers continue to foster advancements that significantly impact the industry.