Harsh Sinha

Title: Harsh Sinha: Innovator in Electron-Optical Systems

Introduction

Harsh Sinha is a prominent inventor based in Santa Clara, CA (US). He has made significant contributions to the field of electron-optical systems, holding a total of 6 patents. His work focuses on advanced methods for inspecting and reviewing samples, particularly in the semiconductor industry.

Latest Patents

One of Harsh Sinha's latest patents is a method and system for edge-of-wafer inspection and review. This innovative electron-optical system is designed to inspect or review an edge portion of a sample. It includes an electron beam source that generates one or more electron beams, a sample stage to secure the sample, and an electron-optical column with a set of elements that direct the electron beams onto the sample's edge. The system also features a sample position reference device and a guard ring device to compensate for fringe fields, with adjustable characteristics. Additionally, it includes a detector assembly to detect electrons emanating from the sample's surface.

Career Highlights

Harsh Sinha has established himself as a key figure in the field of electron-optical systems. His work at Kla Tencor Corporation has been instrumental in advancing technologies that enhance the precision of semiconductor manufacturing processes. His innovative approaches have garnered attention and respect within the industry.

Collaborations

Harsh has collaborated with notable coworkers, including Xinrong Jiang and Christopher Sears. Their combined expertise has contributed to the development of cutting-edge technologies in the field.

Conclusion

Harsh Sinha's contributions to electron-optical systems exemplify his commitment to innovation and excellence. His patents and work at Kla Tencor Corporation continue to influence the semiconductor industry significantly.