Harish Varma Penmethsa

Title: Harish Varma Penmethsa: Innovator in Physical Vapor Deposition Technology

Introduction

Harish Varma Penmethsa is a notable inventor based in Sunnyvale, CA (US). He has made significant contributions to the field of physical vapor deposition (PVD) technology. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of PVD processes.

Latest Patents

Harish's latest patents include innovative methods for physical vapor deposition using backside gas cooling of workpieces. His first patent describes a circular PVD chamber equipped with multiple sputtering targets mounted on the top wall. The chamber features a pallet that rotates around its center axis and can shift in an XY direction. This design allows for precise positioning of workpieces beneath the sputtering targets, ensuring that all areas receive adequate material deposition. Additionally, a scanning magnet is utilized to minimize material waste by only targeting specific portions of the workpiece. The cooling backside gas volume created between the pallet and the sticky tape supporting the workpieces further enhances the deposition process.

Career Highlights

Harish Varma Penmethsa is currently employed at Tango Systems, Inc., where he continues to develop and refine PVD technologies. His expertise in this area has positioned him as a key player in advancing manufacturing processes.

Collaborations

Throughout his career, Harish has collaborated with talented individuals such as Ravi Mullapudi and Harshal T Vasa. These partnerships have contributed to the innovative solutions he has developed in the field of physical vapor deposition.

Conclusion

Harish Varma Penmethsa's contributions to PVD technology demonstrate his commitment to innovation and efficiency in manufacturing processes. His patents reflect a deep understanding of the complexities involved in material deposition, making him a valuable asset in the industry.