Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tango Systems, Inc. (2 from 11 patents)
2 patents:
1. 10550464 - Physical vapor deposition method using backside gas cooling of workpieces
2. 9932668 - Physical vapor deposition system using backside gas cooling of workpieces