Hao-Ken Hung

Title: Hao-Ken Hung: Innovator in Semiconductor Technology

Introduction

Hao-Ken Hung is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his innovative approach to solving complex engineering challenges.

Latest Patents

Hao-Ken Hung's latest patents include a device featuring an alignment mark and method. This device incorporates a diffraction-based overlay (DBO) mark with an upper-layer pattern over a lower-layer pattern, where the smallest dimension exceeds approximately 5 micrometers. Additionally, it includes a calibration mark positioned at the center of the DBO mark, with a smallest dimension less than one-fifth the size of the DBO mark's smallest dimension. Another notable patent is for a system and method aimed at overlay error reduction. This invention involves semiconductor processing apparatuses and methods that allow a semiconductor wafer to be flipped and rotated between the patterning of its front and back sides using first and second reticles.

Career Highlights

Hao-Ken Hung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on advancing technologies that enhance the precision and efficiency of semiconductor manufacturing processes.

Collaborations

Hao-Ken has collaborated with notable colleagues, including Hung-Chung Chien and Chih-Chieh Yang, contributing to various projects that push the boundaries of semiconductor technology.

Conclusion

Hao-Ken Hung's innovative patents and contributions to the semiconductor industry highlight his role as a key figure in advancing technology. His work continues to influence the field and pave the way for future innovations.