Kastl, Germany

Hans-Joachim Luthe


Average Co-Inventor Count = 4.9

ph-index = 1

Forward Citations = 13(Granted Patents)


Company Filing History:


Years Active: 2002-2013

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4 patents (USPTO):Explore Patents

Title: The Innovations of Hans-Joachim Luthe

Introduction

Hans-Joachim Luthe is a notable inventor based in Kastl, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work has had a profound impact on the treatment and processing of semiconductor wafers.

Latest Patents

One of Hans-Joachim Luthe's latest patents involves a method for the treatment of a semiconductor wafer. In this innovative process, semiconductor wafers are treated in a liquid container filled at least partly with a solution containing hydrogen fluoride. This method allows for the dissolution of surface oxide, enabling the wafers to be transported out of the solution along a designated transport direction. After drying, the wafers are treated with an ozone-containing gas to oxidize their surface. Notably, part of the semiconductor wafer surface comes into contact with the ozone-containing gas while another part remains in contact with the solution. The solution and the ozone-containing gas are spatially separated to prevent any contact between them.

Career Highlights

Throughout his career, Hans-Joachim Luthe has worked with prominent companies in the semiconductor industry, including Siltronic AG and Wacker Siltronic Gesellschaft für Halbleiter Materialien AG. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor processing.

Collaborations

Hans-Joachim Luthe has collaborated with several professionals in his field, including Franz Sollinger and Georg-Friedrich Hohl. These collaborations have likely enriched his work and led to further advancements in semiconductor technology.

Conclusion

Hans-Joachim Luthe's contributions to semiconductor technology through his patents and career achievements highlight his role as an influential inventor. His innovative methods for wafer treatment continue to shape the industry and demonstrate the importance of research and development in technology.

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