Han-Tang Su

Title: Han-Tang Su: Innovator in Vertical Comb Drive Structures

Introduction: Han-Tang Su is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of microelectromechanical systems (MEMS) through his innovative patent. His work focuses on the fabrication of advanced structures that enhance device performance.

Latest Patents: Han-Tang Su holds a patent titled "Method for fabricating a self-aligned vertical comb drive structure." This patent describes a method that involves forming a multi-layer structure, which includes inter-digitated first and second comb structures. These structures are created through etching using a first mask layer. The first comb structure features a plurality of first comb fingers, with each finger having distinct portions formed in different device layers. The second comb structure consists of second comb fingers formed solely in the second device layer. This innovative approach allows for the removal of the second finger portions of the first comb fingers, leading to enhanced device functionality.

Career Highlights: Han-Tang Su is currently employed at Asia Pacific Microsystems, Inc., where he continues to develop cutting-edge technologies. His expertise in MEMS fabrication has positioned him as a key player in the industry.

Collaborations: Han-Tang Su has collaborated with notable professionals in his field, including Jer-Wei Hsieh. These partnerships have fostered innovation and contributed to the advancement of MEMS technologies.

Conclusion: Han-Tang Su's contributions to the field of MEMS through his patent and work at Asia Pacific Microsystems, Inc. highlight his role as an influential inventor. His innovative methods for fabricating vertical comb drive structures are paving the way for future advancements in technology.