Location History:
- Kyungki-do, KR (2002)
- Sungnam, KR (2002 - 2008)
Company Filing History:
Years Active: 2002-2008
Title: **Innovative Contributions of Han-ku Cho in Optical Proximity Effect**
Introduction
Han-ku Cho, an esteemed inventor based in Sungnam, South Korea, has made significant strides in the field of photolithography and optical technologies. With a total of four patents to his name, Cho's work has focused on enhancing manufacturing processes in the semiconductor industry, particularly through innovative methods that address optical proximity effects.
Latest Patents
Among his latest contributions is a groundbreaking methodology for manufacturing masks that correct optical proximity effects (OPE). This patented method involves the formation of a dummy pattern with a phase-edge effect on the mask substrate. By utilizing this phase-edge effect, Cho's invention effectively reduces the intensity of transmitted light at the boundaries of two regions with differing phases. This advancement allows for more precise patterning in photolithographic processes, thereby reducing discrepancies between isolated and dense patterns on wafers. His technique improves the overall focus margin by aligning the diffraction patterns of isolated regions with those of dense patterns, enhancing the efficacy of photoresist layers during exposure.
Career Highlights
Currently, Han-ku Cho is associated with Samsung Electronics Co., Ltd., a leading global technology company renowned for its innovative contributions to electronics and semiconductor manufacturing. His expertise in optical engineering has played a vital role in the advancement of technologies implemented in modern electronics.
Collaborations
Throughout his career, Cho has collaborated with talented peers, including notable coworkers Jung-hyeon Lee and Byeong-Soo Kim. These collaborations have further enriched his research and the development of his patents, contributing to significant enhancements in the field of optical technologies.
Conclusion
Han-ku Cho's innovative contributions to the semiconductor industry exemplify how targeted research in optical proximity effects can lead to advancements in manufacturing processes. His patents not only reflect his ingenuity but also underscore the vital role of collaboration in spurring technological innovations that continue to shape the future of electronics.