This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Fei Comapny. Active years: 2023.
Company Filing History:
Years Active: 2023
Title: Han Han - Innovator in Electron Channeling Patterns
Introduction
Han Han is a notable inventor based in Leuven, Belgium. He has made significant contributions to the field of materials science, particularly in the area of electron channeling patterns. His innovative work has led to advancements in determining the offcut angle of crystalline samples, which is crucial for various applications in semiconductor technology.
Latest Patents
Han Han holds a patent titled "Offcut angle determination using electron channeling patterns." This patent describes methods and apparatus that determine the offcut angle of a crystalline sample using electron channeling patterns (ECPs). The backscattered electron intensity exhibits angular variation dependent on crystal orientation. A zone axis normal to a given crystal plane follows a circle as the sample is azimuthally rotated. On an ECP image presented with tilt angles as axes, the radius of the circle represents the offcut angle of the sample. Large offcut angles are determined by a tilt technique that brings the zone axis into the ECP field of view. ECPs are produced with a scanning electron beam and a monolithic backscattered electron detector, or alternatively with a stationary electron beam and a pixelated electron backscatter diffraction detector. The methods described in the patent are 40 times faster than traditional X-ray diffraction techniques, achieving an accuracy of 0.01-0.1 degrees, which enables various semiconductor applications.
Career Highlights
Han Han is currently employed at FEI Company, where he continues to develop innovative technologies in the field of electron microscopy and materials characterization. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor manufacturing processes.
Collaborations
Han has collaborated with notable colleagues, including Libor Strakos and Thomas Hantschel. Their combined expertise has contributed to the advancement of research and development in their respective fields.
Conclusion
Han Han is a distinguished inventor whose work in electron channeling patterns has paved the way for significant advancements in semiconductor technology. His innovative methods and dedication to research continue to impact the industry positively.