Hwaseong-si, South Korea

Hakseung Han

USPTO Granted Patents = 6 

Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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6 patents (USPTO):

Title: Hakseung Han: Innovator in Photomask Technology

Introduction

Hakseung Han is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of photomask technology, holding a total of six patents. His work focuses on innovative methods and apparatuses that enhance the precision and efficiency of photomask manufacturing.

Latest Patents

Hakseung Han's latest patents include an apparatus and method for measuring uniformity based on pupil images. This invention provides a measurement apparatus that includes a light source, a stage for supporting the measurement target, an optical system for transferring light, and a detector for measuring pattern uniformity. The detector is designed to capture a pupil image and assess the pattern uniformity based on the intensity of light. Another notable patent involves a method of annealing reflective photomasks using laser technology. This method entails preparing a reflective photomask and irradiating a laser beam onto its border area, utilizing a beam shaper to create multiple laser beam spots with varying energy profiles.

Career Highlights

Hakseung Han is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of photomask technology. His work has been instrumental in advancing the capabilities of photomasks used in semiconductor manufacturing.

Collaborations

Hakseung Han collaborates with talented colleagues, including Jongju Park and Raewon Yi, who contribute to the development of cutting-edge technologies in their field.

Conclusion

Hakseung Han's contributions to photomask technology through his innovative patents and work at Samsung Electronics Co., Ltd. highlight his role as a leading inventor in the industry. His advancements continue to shape the future of semiconductor manufacturing.

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