Company Filing History:
Years Active: 2020-2025
Title: Hajime Naito: Innovator in Substrate Processing Technology
Introduction
Hajime Naito is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, Naito's work focuses on enhancing the efficiency and effectiveness of substrate processing methods and apparatus.
Latest Patents
Naito's latest patents include a substrate processing method and a substrate processing apparatus. The substrate processing method involves using a processing container designed to process substrates. It features a plasma generation space and a processing space that communicates via a partition plate. The method allows for raising and lowering the substrate during plasma processing, which causes a potential change in the substrate. The substrate processing apparatus generates plasma from gas using high-frequency energy and etches substrates in a processing chamber. It includes a high-frequency power supply, a gas supply source, and a mounting table for the substrate. The partition plate within the chamber is designed to divide the space and suppress ion passage, enhancing the processing capabilities.
Career Highlights
Hajime Naito is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing substrate processing technologies. Naito's innovative approaches have contributed to the development of more efficient processing methods that are crucial for modern electronics.
Collaborations
Naito has collaborated with notable colleagues such as Shigeki Doba and Hiroyuki Ogawa. Their combined expertise has fostered advancements in substrate processing technologies, further enhancing the capabilities of their inventions.
Conclusion
Hajime Naito's contributions to substrate processing technology reflect his dedication to innovation and excellence. His patents and work at Tokyo Electron Limited have significantly impacted the industry, showcasing the importance of continuous advancement in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.