Company Filing History:
Years Active: 2011
Title: Haixing Zhou - Innovator in Optical Measurement Technologies
Introduction
Haixing Zhou is a notable inventor based in Sunnyvale, California. He has made significant contributions to the field of optical measurement technologies. His innovative work has led to the development of a patented method that enhances the precision of azimuth angle measurements.
Latest Patents
Haixing Zhou holds a patent for "Azimuth angle measurement." This patent describes methods and apparatus for measuring an optical azimuth angle (φ) of a substrate relative to a plane of detection in scatterometry tools. The invention involves illuminating a grating target on a stage of a scatterometry tool and observing the positions of the resulting diffraction orders. The optical azimuth angle can be determined from these positions. Additionally, the patent outlines a method for measuring polarization-dependent signals of radiation scattered from a line grating for equal and opposite polarization angles +A and −A. A combination signal is computed from these polarization-dependent signals, allowing for the calculation of a property of the combination signal for various mechanical azimuth angles (φ). This relationship between the optical and mechanical azimuth angles is crucial for improving measurement accuracy.
Career Highlights
Haixing Zhou is currently employed at KLA-Tencor Corporation, a leading company in the field of process control and yield management solutions. His work at KLA-Tencor has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing technologies.
Collaborations
Throughout his career, Haixing Zhou has collaborated with talented professionals, including Shankar Krishnan and Haiming Wang. These collaborations have fostered an environment of innovation and have led to the successful development of new technologies.
Conclusion
Haixing Zhou's contributions to optical measurement technologies exemplify the impact of innovation in the semiconductor industry. His patented methods for azimuth angle measurement are a testament to his expertise and dedication to advancing technology.