Haejoong Park

Title: Innovator Spotlight: Haejoong Park

Introduction

Haejoong Park is a prolific inventor based in Suwon-si, South Korea, known for his contributions to the field of plasma etching technology. With a remarkable portfolio that includes five patents, he has made significant strides in enhancing manufacturing processes in the semiconductor industry.

Latest Patents

Among his most notable inventions is a patented apparatus and method for plasma etching. This innovative apparatus features an electrostatic chuck that includes a base layer, bonding layer, and an adsorption layer with multiple protrusions designed to contact the lower surface of a substrate. The design also incorporates a surrounding edge ring, a system of coolant suppliers that injects coolant between the protrusions, and a network of pipes to circulate the coolant in a specific direction. Additionally, the cooling device's operation is strategic, with the plasma etching process being divided into first and second operations to control the temperature effectively, determined by a controller that regulates a valve connected to the coolant pipes.

Career Highlights

Haejoong Park is an integral part of Samsung Electronics Co., Ltd., where he has been involved in cutting-edge research and development. His expertise in plasma etching not only enhances the efficiency of semiconductor manufacturing processes but also exemplifies the innovative spirit of the company.

Collaborations

Throughout his career, Haejoong has collaborated with several esteemed colleagues, including Jongwoo Sun and Kye Hyun Baek. These professional relationships have fostered an environment of innovation and creativity, leading to the success of their joint ventures in technology development.

Conclusion

Haejoong Park stands out as a key figure in the world of technology and innovation, particularly in the semiconductor sector. His contributions in the form of patents demonstrate not only his technical prowess but also his commitment to advancing industrial processes. With ongoing work at Samsung Electronics, Park continues to pave the way for future breakthroughs in plasma etching and related technologies.