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Yongin-si, South Korea

Hae-Joong Park

USPTO Granted Patents = 3

Average Co-Inventor Count = 4.2

ph-index = 2

Forward Citations = 5(Granted Patents)

Location History:

Suwon-si, KR (2011)
Yongin-si, KR (2021 - 2022)

Company Filing History:

3 out of 131,611

Samsung Electronics Co., Ltd.

Years Active: 2011-2022

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11501987 - Loadlock module and semiconductor manufacturing apparatus including the same (2022-11-15),

2. 10971382 - Loadlock module and semiconductor manufacturing apparatus including the same (2021-04-06),

3. 7869185 - Method of de-chucking wafer using direct voltage and alternating voltage, and apparatus for fabricating semiconductor device using the same (2011-01-11),

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