Gwo-chun Tzu

Title: Gwo-chun Tzu: Innovator in Substrate Support Technology

Introduction: Gwo-chun Tzu is a notable inventor based in Sunnyvale, CA, who has made significant contributions to the field of substrate support technology. With a focus on enhancing the efficiency and functionality of substrate supports, Tzu has developed innovative solutions that are crucial for various applications.

Latest Patents: Tzu holds a patent for a "Substrate support having brazed plates and resistance heater." This invention features a substrate support that comprises top, middle, and bottom plates brazed together. The top plate includes a surface with multiple outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the recessed grooves, and several gas ports. The middle plate is designed with multiple feedthroughs aligned with the corresponding top feedthroughs of the top plate, while the bottom plate has feedthroughs aligned with the middle plate. The innovative design is joined by brazed bond layers, enhancing the overall performance of the substrate support.

Career Highlights: Tzu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. His work at Applied Materials has allowed him to contribute to advancements in substrate support technology, which is essential for manufacturing processes in the semiconductor industry.

Collaborations: Tzu has collaborated with notable colleagues, including Salvador P Umotoy and Lawrence Chung-Lai Lei. These collaborations have fostered a productive environment for innovation and development in their respective fields.

Conclusion: Gwo-chun Tzu's contributions to substrate support technology exemplify the impact of innovative thinking in the semiconductor industry. His patent and work at Applied Materials, Inc. highlight his role as a key inventor in advancing technology.