The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Aug. 17, 2006
Salvador P. Umotoy, Antioch, CA (US);
Lawrence Chung-lai Lei, Milpitas, CA (US);
Gwo-chun Tzu, Sunnyvale, CA (US);
Xiangxiong (John) Yuan, San Jose, CA (US);
Michael S. Jackson, Sunnyvale, CA (US);
Hymam Lam, San Francisco, CA (US);
Salvador P. Umotoy, Antioch, CA (US);
Lawrence Chung-Lai Lei, Milpitas, CA (US);
Gwo-chun Tzu, Sunnyvale, CA (US);
Xiangxiong (John) Yuan, San Jose, CA (US);
Michael S. Jackson, Sunnyvale, CA (US);
Hymam Lam, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support comprises top, middle and bottom plates which are brazed together. The top plate has a top surface with a plurality of outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the recessed grooves, and plurality of gas ports. The middle plate has a plurality of middle feedthroughs aligned to corresponding top feedthroughs of the top plate, and the bottom plate has a plurality of bottom feedthroughs aligned to the middle feedthroughs of the middle plate. The top and middle plates are joined by a first brazed bond layer and the middle and bottom plates are joined by a second brazed bond layer.