Guodao Shan

Title: Guodao Shan: Innovator in Semiconductor Processing Technology

Introduction

Guodao Shan is a prominent inventor based in Beijing, China. He has made significant contributions to the field of semiconductor processing, particularly through his innovative patent. His work focuses on enhancing the efficiency and effectiveness of power control methods in semiconductor equipment.

Latest Patents

Guodao Shan holds a patent for a "Power control method and device of lower radio frequency power supply and semiconductor processing equipment." This patent outlines a method that involves obtaining a power compensation coefficient for a processing chamber relative to a reference chamber. By utilizing predetermined power compensation equations and RF circuit parameters, the method calculates a power compensation value to optimize the output of the lower RF power supply during semiconductor processing.

Career Highlights

Shan is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd., where he applies his expertise in semiconductor technology. His innovative approach has positioned him as a key player in the development of advanced semiconductor processing techniques.

Collaborations

Guodao Shan has collaborated with notable colleagues, including Jing Jing Wei and Yu Zhang. Their combined efforts contribute to the advancement of semiconductor technology and innovation within their organization.

Conclusion

Guodao Shan's contributions to semiconductor processing through his innovative patent demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry and pave the way for future innovations.