Location History:
- Gilbert, AZ (US) (2007)
- Menlo Park, CA (US) (2008)
Company Filing History:
Years Active: 2007-2008
Title: Gunilla Jacobson: Innovator in Silicon-Oxide Processing
Introduction
Gunilla Jacobson is a prominent inventor based in Menlo Park, CA (US). She has made significant contributions to the field of semiconductor processing, particularly in the area of silicon-oxide based low-k materials. With a total of 2 patents, her work has advanced the technology used in microelectronics.
Latest Patents
Gunilla's latest patents include a method of passivating silicon-oxide based low-k materials using a supercritical carbon dioxide passivating solution. This innovative method involves a silylating agent, preferably an organosilicon compound with organo-groups containing five carbon atoms, such as hexamethyldisilazane (HMDS), chlorotrimethylsilane (TMCS), and trichloromethylsilane (TCMS). Additionally, her patents describe a system and method for processing a substrate using supercritical carbon dioxide processing, which includes a film removal system that effectively cleans and processes substrates with dielectric films.
Career Highlights
Gunilla Jacobson has established herself as a key figure in her field through her innovative approaches and technical expertise. Her work at Tokyo Electron Limited has allowed her to collaborate with leading professionals in the industry, further enhancing her contributions to semiconductor technology.
Collaborations
Some of her notable coworkers include Glenn W Gale and Joseph T Hillman, who have worked alongside her in various projects at Tokyo Electron Limited.
Conclusion
Gunilla Jacobson's contributions to the field of semiconductor processing are noteworthy, and her innovative patents continue to influence the industry. Her work exemplifies the importance of advancements in technology and the role of inventors in shaping the future of microelectronics.