Guk-hyeong Cho

Title: Guk-hyeong Cho and His UV Irradiation Apparatus

Introduction

Guk-hyeong Cho is an inventor associated with Samsung Electronics Co., Ltd. in Yongin, South Korea. His patent work includes an apparatus designed to improve the removal of protective tape from semiconductor wafers through controlled UV irradiation and temperature management.

Latest Patents

Cho is credited with 1 patent, titled “UV Irradiation Apparatus.” The invention includes a UV lamp mounted in a chamber, a vacuum chuck beneath the lamp to support and move a wafer, and a reflector that concentrates UV rays on the chuck. Heating blocks on both sides of the chuck help maintain a substantially constant temperature around the wafer.

The apparatus is intended to irradiate protective tape attached to a wafer’s front surface. By controlling the temperature during exposure, it supports conditions that can chemically degrade the tape’s adhesive, making the tape easier to detach from the wafer.

Career Highlights

Cho’s listed patent reflects work on semiconductor-processing equipment, particularly the use of UV exposure and temperature control to facilitate wafer handling. His professional association with Samsung Electronics connects this invention to a company active in electronics and semiconductor technologies.

Collaborations

Dong-ho Kim and Byung-kwan Lee are identified as Cho’s coworkers. The available information does not specify their roles in the patent or whether they collaborated directly on the invention.

Conclusion

Guk-hyeong Cho’s UV irradiation apparatus combines focused UV exposure with temperature control to support the removal of protective tape from wafers.