This inventor holds 1 USPTO granted patent. Top assignee: Beijing Naura Microelectronics Equipment Co., Ltd.. Active years: 2021.
Company Filing History:
Years Active: 2021
Title: Guilong Wu - Innovator in Plasma Processing Technology
Introduction
Guilong Wu is a prominent inventor based in Beijing, China. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus that addresses critical challenges in the industry.
Latest Patents
Guilong Wu holds a patent for a plasma processing apparatus. This apparatus includes a chamber and a target positioned above the chamber. The design features an insulating sub-chamber and a first conductive sub-chamber, which are superposed. The first conductive sub-chamber is located beneath the insulating sub-chamber. The insulating sub-chamber is constructed from insulating material, while the first conductive sub-chamber is made of metal. A Faraday shield component, which can be made of either metal or insulating material electroplated with conductive coatings, is included in the insulating sub-chamber. This component features at least one slit. An inductance coil surrounds the exterior of the insulating sub-chamber. This innovative design effectively solves the problem of wafer contamination caused by particles formed on the surface of the coil during the sputtering process.
Career Highlights
Guilong Wu is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd. His work at this company has been instrumental in advancing plasma processing technologies. He has demonstrated a strong commitment to innovation and excellence in his field.
Collaborations
Guilong Wu collaborates with talented coworkers, including Mengxin Zhao and Bai Yang. Their combined expertise contributes to the success of their projects and the advancement of technology in their industry.
Conclusion
Guilong Wu is a notable inventor whose work in plasma processing technology has made a significant impact. His innovative patent addresses critical issues in the field, showcasing his dedication to advancing technology. His contributions continue to influence the industry positively.