This inventor holds 1 USPTO granted patent. Top assignee: Chartered Semiconductor Manufacturing Ltd (Corporation). Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Guat Choo Goh: Innovator in Semiconductor Technology
Introduction
Guat Choo Goh is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. His innovative approach has led to advancements in the field, particularly in the area of photoresist removal processes.
Latest Patents
Guat Choo Goh holds 1 patent for his invention titled "Dark CF.sub.4 flash." This patent describes a new method for removing photoresist residues and sidewall deposits from semiconductor device structures. The process involves covering semiconductor device structures with an insulating layer, followed by the deposition of a metal layer. The metal layer is then patterned using a photoresist mask, which is exposed to actinic light. The innovative aspect of his method lies in the use of a plasma comprising O.sub.2 and CF.sub.4 at low power to effectively remove residues and deposits, ensuring a clean surface for further processing.
Career Highlights
Guat Choo Goh has made significant strides in his career, particularly while working at Chartered Semiconductor Manufacturing Ltd. His expertise in semiconductor manufacturing processes has positioned him as a key figure in the industry.
Collaborations
Guat Choo Goh collaborates with Xin Wei Zhang, a talented woman in the field, contributing to advancements in semiconductor technology through their combined efforts.
Conclusion
Guat Choo Goh's innovative work in semiconductor technology, particularly his patented method for photoresist removal, showcases his significant contributions to the field. His collaboration with skilled professionals further enhances the impact of his inventions.