Company Filing History:
Years Active: 2002-2011
Title: Innovations of Guangying Zhang in Slurry Distribution Technology
Introduction
Guangying Zhang is an accomplished inventor based in Chandler, AZ (US). He holds a total of 3 patents that focus on advancements in slurry distribution technology. His work has significantly contributed to the field of polishing processes, particularly in the semiconductor industry.
Latest Patents
Guangying Zhang's latest patents include a "Method and apparatus for controlled slurry distribution." This invention discloses a method for 'through-the-pad' delivery of slurry polishing agents directly to the land areas of a polishing pad. The invention enhances the control of the chemical composition of the slurry, addressing the loss of chemical reactivity during the polishing cycle. Additionally, it introduces various groove modifications to the polishing surface of the pad, improving slurry retention and reducing the slow band effect. This innovation aims to achieve a higher degree of planarization and uniformity in material removal from processed workpieces, ultimately reducing the Cost-of-Ownership associated with slurry costs.
Another significant patent by Zhang is the "Method and apparatus for controlling slurry distribution," which shares similar features and benefits as his previous invention. Both patents reflect his commitment to improving the efficiency and effectiveness of polishing processes.
Career Highlights
Throughout his career, Guangying Zhang has worked with notable companies such as Speedfam-IPEC Corporation and Novellus Systems Incorporated. His experience in these organizations has allowed him to refine his expertise in slurry technology and contribute to various innovative projects.
Collaborations
Guangying Zhang has collaborated with esteemed professionals in his field, including Thomas Laursen and Sumit Guha. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Guangying Zhang's contributions to slurry distribution technology demonstrate his innovative spirit and dedication to enhancing polishing processes. His patents not only address critical challenges in the industry but also pave the way for future advancements.