Company Filing History:
Years Active: 2001
Title: Innovations of Guan Ping Wu in Semiconductor Technology
Introduction
Guan Ping Wu is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. He has been instrumental in developing innovative methods for etching silicon nitride spacers, which are crucial in the fabrication of integrated circuits. With a total of 2 patents, his work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Guan Ping Wu's latest patents include a method for high selective nitride spacer etch with a high ratio of spacer width to deposited nitride thickness. This invention involves etching silicon nitride spacers beside a gate structure, utilizing a plasma etcher to achieve precise results. The etch recipe includes specific conditions such as a chlorine flow between 35 and 55 molar percent and a helium flow between 35 and 55 molar percent, ensuring a spacer width to nitride layer thickness ratio of about 1:1 without damaging the silicon substrate surface.
Another significant patent is his method to form an L-shaped silicon nitride sidewall spacer. This innovative approach employs a two-step etching process to create tapered, L-shaped spacer profiles. The method involves depositing a silicon nitride layer over a liner oxide layer and anisotropically etching it to form sidewall spacers adjacent to conductive traces. This technique enhances the performance of integrated circuit devices by providing a more efficient spacer profile.
Career Highlights
Guan Ping Wu has made substantial contributions to the field of semiconductor manufacturing through his work at Chartered Semiconductor Manufacturing Ltd. His expertise in etching processes has led to advancements that improve the quality and reliability of semiconductor devices. His innovative methods are now integral to modern fabrication techniques.
Collaborations
Throughout his career, Guan Ping Wu has collaborated with esteemed colleagues such as Jie Yu and Yelehanka Ramachandramurthy Pradeep. These collaborations have fostered a productive environment for innovation and have contributed to the successful development of new technologies in the semiconductor industry.
Conclusion
Guan Ping Wu's contributions to semiconductor technology through his innovative patents and collaborative efforts have established him as a key figure in the field. His work continues to influence the manufacturing processes of integrated circuits, showcasing the importance of innovation in technology.