Gregory Siu

Title: Gregory Siu - Innovator in High Temperature Clean Technologies

Introduction

Gregory Siu is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of clean technologies, particularly in methods that enhance the efficiency and safety of processing chambers.

Latest Patents

Gregory Siu holds a patent titled "Method and system for high temperature clean." This invention relates to systems and methods designed to prevent free radical damage to sensitive components within a process chamber. The patent outlines a process that utilizes a cover substrate on lift pins and an inert bottom purge flow to shield the substrate support from halogen reactants. During the cleaning process, the cover substrate and the purge flow work together to restrict halogen reactants from contacting the substrate support. The method involves several steps, including placing a cover substrate on lift pins, raising it to create a space, and supplying gases to optimize the cleaning process.

Career Highlights

Gregory Siu is currently employed at Applied Materials, Inc., where he continues to innovate in the field of semiconductor manufacturing and clean technologies. His work focuses on enhancing the reliability and performance of processing equipment.

Collaborations

Some of Gregory's coworkers include Sanjeev Baluja and Kalyanjit Ghosh, who contribute to the collaborative environment at Applied Materials, Inc. Their combined expertise fosters innovation and drives advancements in technology.

Conclusion

Gregory Siu's contributions to high temperature clean technologies exemplify the importance of innovation in the semiconductor industry. His patent and ongoing work at Applied Materials, Inc. highlight his commitment to improving processing methods and ensuring the integrity of sensitive components.