Gregory N Burton

Title: Gregory N Burton: Innovator in Semiconductor Technology

Introduction

Gregory N Burton is a notable inventor based in Burlingame, CA, who has made significant contributions to the field of semiconductor technology. With a total of 3 patents to his name, Burton has developed innovative methods that enhance the performance of integrated circuits.

Latest Patents

One of Burton's latest patents is a method of making extended silicide and external contact. This process allows for the creation of high-performance bipolar and MOS devices on the same integrated circuit die. The method involves forming isolation islands of epitaxial silicon surrounded by field oxide, and creating MOS transistors with polysilicon gates in some islands, while bipolar transistors with polysilicon emitters are formed in others. Insulating spacers are created around the edges of the polysilicon electrodes, followed by the deposition of a refractory metal, preferably titanium covered with tungsten. This is heat-treated to form titanium disilicide, which is used to create electrical contacts. Additionally, Burton has developed a submerged wall isolation technique for silicon islands, which involves cutting a trench into an epitaxial layer to isolate the active area from the substrate.

Career Highlights

Throughout his career, Gregory N Burton has worked with prominent companies in the semiconductor industry, including Fairchild Camera and Instrument Corporation and Fairchild Semiconductor Corporation. His work has significantly impacted the development of advanced semiconductor devices.

Collaborations

Burton has collaborated with notable professionals in the field, including Madhukar B Vora and Ashok K Kapoor. These collaborations have contributed to the advancement of semiconductor technologies and innovations.

Conclusion

Gregory N Burton's contributions to semiconductor technology through his patents and career achievements highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of integrated circuit design and performance.