This inventor holds 1 USPTO granted patent. Top assignee: Motorola Corporation. Active years: 1995.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1995
Title: Gregory E Bartlett: Innovator in Semiconductor Technology
Introduction
Gregory E Bartlett is a notable inventor based in Phoenix, AZ (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent that addresses environmental concerns in the manufacturing process.
Latest Patents
One of Gregory E Bartlett's key patents is titled "Dry etch method using non-halocarbon source gases." This invention allows for the dry etching of silicon layers, such as SiO₂, overlying silicon substrates in semiconductor devices. The method eliminates the need for traditional halocarbon gases, which are known to be greenhouse gases. Instead, it utilizes a fluorine source, such as HF or F₂ gases, to produce the active fluorine radicals necessary for etching. Additionally, a carbon-oxygen source, either CO or CO₂, is used to stabilize polymer build-up in the reactor, with the option to add a hydrogen source as needed. This innovative approach not only enhances the etching process but also contributes to a more environmentally friendly manufacturing method.
Career Highlights
Gregory E Bartlett is associated with Motorola Corporation, where he has applied his expertise in semiconductor technology. His work has been instrumental in advancing the efficiency and sustainability of semiconductor manufacturing processes.
Collaborations
Throughout his career, Gregory has collaborated with notable colleagues, including Jonathan C Dahm and Gregory S Ferguson. These collaborations have fostered innovation and contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Gregory E Bartlett's contributions to semiconductor technology, particularly through his environmentally conscious patent, highlight his role as an innovator in the field. His work at Motorola Corporation and collaborations with other professionals underscore the importance of innovation in advancing technology while addressing environmental challenges.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile